This paper demonstrates a newly developed parylene bowed-type valve with the same working principle of the "buckled straw". Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing parts into the valve device. By the merit of its concise mechanism, i.e., a straight pipeline with the region for buckling, the bowed-type valve intrinsically operates with almost zero dead volume. The fabrication sequence of this new valve combines the techniques of sacrificial mould of capillary glass tubes, conformal coating of parylene and SU-8 photolithography. A valve device of 1 cm long, 0.8 cm wide is demonstrated, and the turn-on angle of this valve verified as 135° experimentally.
淡江理工學刊=Tamkang journal of science and engineering 8(3), pp.245-248