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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45677


    Title: The Parylene Bowed-Type Valves
    Authors: Wang, Hsin-hsiung;Liu, Kuan-chun;Ko, Kai-chung;楊龍杰;Yang, Lung-jieh
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Bowed-type valve;Circular microchannel;Parylene;SU-8
    Date: 2005-09-01
    Issue Date: 2010-03-26 19:43:56 (UTC+8)
    Publisher: 淡江大學
    Abstract: This paper demonstrates a newly developed parylene bowed-type valve with the same working principle of the “buckled straw”. Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing parts into the valve device. By the merit of its concise mechanism, i.e., a straight pipeline with the region for buckling, the bowed-type valve intrinsically operates with almost zero dead volume. The fabrication sequence of this new valve combines the techniques of sacrificial mould of capillary glass tubes, conformal coating of parylene and SU-8 photolithography. A valve device of 1 cm long, 0.8 cm wide is demonstrated, and the turn-on angle of this valve verified as 135 experimentally.
    Relation: 淡江理工學刊=Tamkang journal of science and engineering 8(3), pp.245-248
    DOI: 10.6180/jase.2005.8.3.11
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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