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    题名: Electro-Hydro-Dynamic (EHD) Micropumps with Electrode Protection by Parylene and Gelatin
    作者: Wang, Jiun-min;楊龍杰;Yang, Lung-jieh
    贡献者: 淡江大學機械與機電工程學系
    关键词: Parylene;Gelatin;Surface Modification;Electro-Hydro-Dynamic EHD
    日期: 2005-09-01
    上传时间: 2010-03-26 19:43:23 (UTC+8)
    出版者: 淡江大學
    摘要: This paper describes an ejection-type electro-hydro-dynamic (EHD) micropump using various types of polymers to protect the electrodes. The polymer layers of parylene and crosslinked gelatin were shown to protect the gold electrodes from electrolytic aging. The pump chip is packaged by the polydimethylsiloxane (PDMS) bonding technique. The results show that the polymer protection layers are successful in prolonging the operation lifetime. They can also provide the inner walls of channels with different surface properties for the working liquid to be driven through.
    關聯: 淡江理工學刊=Tamkang journal of science and engineering 8(3), pp.231-236
    DOI: 10.6180/jase.2005.8.3.09
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文


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