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    题名: Fabrication and test of radial grooved micro heat pipes
    作者: 康尚文;Kang , Shung-wen;Tsai, Sheng-hong;Chen, Hong-chih
    贡献者: 淡江大學機械與機電工程學系
    关键词: Micro heat pipe;Bulk micromachining;Eutectic bonding
    日期: 2002-10-01
    上传时间: 2010-03-26 19:43:06 (UTC+8)
    出版者: Elsevier
    摘要: This paper describes the development of radial grooved micro heat pipes (MHPs) with a three-layer structure. The MHPs were designed to allow separation of the liquid and vapor flow to reduce the viscous shear force. The 5×5 cm2 MHP array was fabricated by using bulk micromachining and eutectic bonding techniques on 4-in. (1 0 0) silicon wafers. Experiments were undertaken to evaluate the performance of wafers with three different wafer fill rates at different input powers. We glued a heater below the evaporator section, pumped cold water through a square copper heat exchanger above the heat pipe, and pasted 15 K-type thermocouples on both sides of MHP structure to record the variations of surface temperature. After the evaluation, the MHP with 70% fill rate showed the best performance as compared to samples with smaller fill rates.
    關聯: Applied thermal engineering 22(14), pp.1559-1568
    DOI: 10.1016/S1359-4311(02)00085-6
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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