Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates

淡江大學機構典藏 > 理學院 > 物理學系暨研究所 > 期刊論文 > Item 987654321/42032

請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/42032

題名:	Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates
作者:	Shih, Wen-ching;Wang, Mao-jin;林諭男;Lin, I-nan
貢獻者:	淡江大學物理學系
關鍵詞:	Nanocrystalline diamond;Surface acoustic wave devices;High frequency electronics;Sputtering
日期:	2008-03-01
上傳時間:	2010-02-23 14:23:34 (UTC+8)
出版者:	Elsevier
摘要:	The propagation characteristics of surface acoustic wave for the ZnO piezoelectric films and nanocrystalline diamond (NCD) films multilayer SAW devices on Si substrates were investigated. High surface acoustic wave velocity is achieved for a ZnO/NCD/Si multilayer structure excited by a bottom-electroded device configuration. The NCD films deposited on Si substrates (NCD/Si) not only possess smooth surface, but also show good compatibility with ZnO materials, such that [002] textured ZnO films can be directly grown on NCD/Si substrates without the necessity of using buffer layer. The surface acoustic wave velocity increased with the thickness of the NCD films. For the thickness of the ZnO and NCD films investigated, the 0th mode surface acoustic velocity in IDT/ZnO/NCD/Si structure achieves 5100 m/s, whereas the 1st mode SAW in the ZnO/IDT/NCD/Si structure reaches 8500 m/s.
關聯:	Diamond and Related Materials 17(3), pp.390-395
DOI:	10.1016/j.diamond.2008.01.082
顯示於類別:	[物理學系暨研究所] 期刊論文

文件中的檔案:

檔案	大小	格式	瀏覽次數
index.html	0Kb	HTML	41	檢視/開啟

在機構典藏中所有的資料項目都受到原著作權保護.

TAIR相關文章