淡江大學機構典藏:Item 987654321/42026
English  |  正體中文  |  简体中文  |  Items with full text/Total items : 62805/95882 (66%)
Visitors : 3947402      Online Users : 594
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
    •  Adv. Search
    Home ‧ Login ‧ Upload ‧ Help ‧ About ‧ Administer Goto mobile version


    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/42026


    Title: Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique
    Authors: Lee, Y. C.;Lin, S. J.;Buck, V.;Kunze, R.;Schmidt, H.;Lin, C. Y.;Fang, W. L.;林諭男;Lin, I-nan
    Contributors: 淡江大學物理學系
    Keywords: UNCD;Nano-diamond;SAW;Laser-induced SAW pulse technique
    Date: 2008-04-01
    Issue Date: 2010-02-23 14:17:44 (UTC+8)
    Publisher: Elsevier
    Abstract: Diamond is one of the best SAW substrate candidates due to its highest sound velocity and thermal conductivity. But conventional diamond films usually express facet structure with large roughness. Ultra-nanocrystallined diamond (UNCD) films grown in a 2.45 GHz IPLAS microwave plasma enhanced chemical vapor deposition (MPECVD) system on Si (100) substrates in CH4-Ar plasma possess naturally smooth surface and are advantageous for device applications. Moreover, highly C-axis textured aluminum nitride (AlN) films can be grown by DC-sputtering directly on UNCD coated Si substrate. However, properties of UNCD films are much complex than microcrystalline diamond films, that is because this is a very complex material system with large but not fixed portion of grain boundaries and sp2/sp3 bonding. Properties of UNCD films could change dramatically with similar deposition condition and with similar morphologies. A simple and quick method to characterize the properties of these UNCD films is important and valuable. Laser-induced SAW pulse method, which is a fast and accurate SAW properties measuring system, for the investigation of mechanical and structure properties of thin films without any patterning or piezoelectric layer.
    Relation: Diamond and Related Materials 17(4-5), pp.446-450
    DOI: 10.1016/j.diamond.2007.08.025
    Appears in Collections:[Graduate Institute & Department of Physics] Journal Article

    Files in This Item:

    File SizeFormat
    index.html0KbHTML59View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback