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    题名: Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique
    作者: Lee, Y. C.;Lin, S. J.;Buck, V.;Kunze, R.;Schmidt, H.;Lin, C. Y.;Fang, W. L.;林諭男;Lin, I-nan
    贡献者: 淡江大學物理學系
    关键词: UNCD;Nano-diamond;SAW;Laser-induced SAW pulse technique
    日期: 2008-04-01
    上传时间: 2010-02-23 14:17:44 (UTC+8)
    出版者: Elsevier
    摘要: Diamond is one of the best SAW substrate candidates due to its highest sound velocity and thermal conductivity. But conventional diamond films usually express facet structure with large roughness. Ultra-nanocrystallined diamond (UNCD) films grown in a 2.45 GHz IPLAS microwave plasma enhanced chemical vapor deposition (MPECVD) system on Si (100) substrates in CH4-Ar plasma possess naturally smooth surface and are advantageous for device applications. Moreover, highly C-axis textured aluminum nitride (AlN) films can be grown by DC-sputtering directly on UNCD coated Si substrate. However, properties of UNCD films are much complex than microcrystalline diamond films, that is because this is a very complex material system with large but not fixed portion of grain boundaries and sp2/sp3 bonding. Properties of UNCD films could change dramatically with similar deposition condition and with similar morphologies. A simple and quick method to characterize the properties of these UNCD films is important and valuable. Laser-induced SAW pulse method, which is a fast and accurate SAW properties measuring system, for the investigation of mechanical and structure properties of thin films without any patterning or piezoelectric layer.
    關聯: Diamond and Related Materials 17(4-5), pp.446-450
    DOI: 10.1016/j.diamond.2007.08.025
    显示于类别:[物理學系暨研究所] 期刊論文

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