English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 58323/91876 (63%)
造访人次 : 14080458      在线人数 : 61
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻

    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/42026

    题名: Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique
    作者: Lee, Y. C.;Lin, S. J.;Buck, V.;Kunze, R.;Schmidt, H.;Lin, C. Y.;Fang, W. L.;林諭男;Lin, I-nan
    贡献者: 淡江大學物理學系
    关键词: UNCD;Nano-diamond;SAW;Laser-induced SAW pulse technique
    日期: 2008-04-01
    上传时间: 2010-02-23 14:17:44 (UTC+8)
    出版者: Elsevier
    摘要: Diamond is one of the best SAW substrate candidates due to its highest sound velocity and thermal conductivity. But conventional diamond films usually express facet structure with large roughness. Ultra-nanocrystallined diamond (UNCD) films grown in a 2.45 GHz IPLAS microwave plasma enhanced chemical vapor deposition (MPECVD) system on Si (100) substrates in CH4-Ar plasma possess naturally smooth surface and are advantageous for device applications. Moreover, highly C-axis textured aluminum nitride (AlN) films can be grown by DC-sputtering directly on UNCD coated Si substrate. However, properties of UNCD films are much complex than microcrystalline diamond films, that is because this is a very complex material system with large but not fixed portion of grain boundaries and sp2/sp3 bonding. Properties of UNCD films could change dramatically with similar deposition condition and with similar morphologies. A simple and quick method to characterize the properties of these UNCD films is important and valuable. Laser-induced SAW pulse method, which is a fast and accurate SAW properties measuring system, for the investigation of mechanical and structure properties of thin films without any patterning or piezoelectric layer.
    關聯: Diamond and Related Materials 17(4-5), pp.446-450
    DOI: 10.1016/j.diamond.2007.08.025
    显示于类别:[物理學系暨研究所] 期刊論文


    档案 大小格式浏览次数



    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈