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    题名: Transparent ultrananocrystalline diamond films on quartz substrate
    作者: Joseph, P. T.;Tai, Nyan-hwa;Chen, Yi-chun;Cheng, Hsiu-fung;林諭男;Lin, I-nan
    贡献者: 淡江大學物理學系
    关键词: UNCD;MPECVD;Transmittance
    日期: 2008-04-01
    上传时间: 2010-02-23 14:16:00 (UTC+8)
    出版者: Elsevier
    摘要: Highly transparent ultrananocrystalline diamond (UNCD) films were deposited on quartz substrates using microwave plasma enhanced chemical vapor deposition (MPECVD) method. Low temperature growth of high quality transparent UNCD films was achieved by without heating the substrates prior to the deposition. Additionally, a new method to grow NCD and microcrystalline diamond (MCD) films on quartz substrates has been proposed. Field emission scanning electron microscopy (FESEM) and Raman spectroscopy were used to analyze the surface and structural properties of the films. The surface morphology of UNCD film shows very smooth surface characteristics. The transparent property studies of UNCD film on quartz substrate showed 90% transmittance in the near IR region. The transparent and dielectric properties of UNCD, NCD, and MCD films on quartz substrates were compared and reported.
    關聯: Diamond and Related Materials 17(4-5), pp.476-480
    DOI: 10.1016/j.diamond.2007.10.013
    显示于类别:[物理學系暨研究所] 期刊論文

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