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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/38059


    Title: A new method of anti-stiction for parylene MEMS process
    Authors: 楊龍杰;Yang, Lung-jieh;Wang, Juin-min;Lin, Hung-hua
    Contributors: 淡江大學機械與機電工程學系
    Date: 2004-07
    Issue Date: 2010-01-11 14:35:38 (UTC+8)
    Relation: International Conference on Electrical Engineering 2004 joined with Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004, Sapporo, Japan, pp.563-567
    Appears in Collections:[機械與機電工程學系暨研究所] 會議論文

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