淡江大學機構典藏:Item 987654321/38058
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    題名: The micro ion drag pump using indium-tin-oxide (ITO) electrodes
    作者: Yang, Lung-jieh;Wang, Jiun-min;Huang, Yu-lin
    貢獻者: 淡江大學機械與機電工程學系
    日期: 2003-01-19
    上傳時間: 2010-04-15 10:35:24 (UTC+8)
    出版者: Piscataway: Institute of Electrical and Electronic Engineers (IEEE)
    摘要: This paper describes a micro ion drag pump, or an ejection type electro-hydrodynamic (EHD) micro pump, using Indium-Tin-Oxide (ITO) planar electrodes novelly. The ITO film for the electrodes makes anodic bonding easily and feasible in packaging the glass substrate (with ITO) hermetically with the silicon micro channels. Therefore, the scaling down or the miniaturization of ion drag pumps can be achieved herein. The ITO electrodes could drive the ethyl alcohol to have the maximum volumetric flow rate of 87 nl/min with applying a DC driving voltage of 40 Volts. More efforts and improvements on the pumping efficiency as well as the long-term stability of the ITO electrodes are acquired correspondingly.
    關聯: Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp.112-115
    DOI: 10.1109/MEMSYS.2003.1189700
    顯示於類別:[機械與機電工程學系暨研究所] 會議論文

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