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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/38047

    Title: A new method to fabricate the blazed gratings by the anisotropic etching on the(110)silicon wafers
    Authors: 楊龍杰;Yang, Lung-jieh;Chang, P. Z.;Lee, C. K.;Teng, J. T.
    Contributors: 淡江大學機械與機電工程學系
    Date: 1997-11-10
    Issue Date: 2010-01-11 14:34:33 (UTC+8)
    Relation: Proceedings of SPIE(symposium of Far East and Pacific rim on smart materials and MEMS), v.3242~02, Adelaide, Australia, pp.46-51
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Proceeding

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