淡江大學機構典藏:Item 987654321/38036
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    題名: The testing machine for micro-sensors subjected to different states of pressure and temperature
    作者: Yang, Lung-jieh;Wang, Hsin-hsiung;Liao, Wei-hao;Huang, Han-wei;Chang, Chih-cheng
    貢獻者: 淡江大學機械與機電工程學系
    日期: 2005-07-10
    上傳時間: 2010-04-15 10:31:46 (UTC+8)
    出版者: N.Y.: Institute of Electrical and Electronic Engineers (IEEE)
    摘要: The primary purpose of this research is to design and build up a test machine which provides a testing environment for semiconductor micro sensors made by micro-electro-mechanical systems (MEMS) technique. It combines computer auxiliary software SPARTAN into the global data-gathering system in addition to the main frame of the pressurized chamber. Different states of temperature and pressure subject to the testing of commercial pressure sensors was not only successfully achieved but the real-time sampling of the MEMS sensor output also worked well.
    關聯: Mechatronics, 2005. ICM '05. IEEE International Conference on, pp.805-810
    DOI: 10.1109/ICMECH.2005.1529365
    顯示於類別:[機械與機電工程學系暨研究所] 會議論文

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