The testing machine for micro-sensors subjected to different states of pressure and temperature

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Title:	The testing machine for micro-sensors subjected to different states of pressure and temperature
Authors:	Yang, Lung-jieh;Wang, Hsin-hsiung;Liao, Wei-hao;Huang, Han-wei;Chang, Chih-cheng
Contributors:	淡江大學機械與機電工程學系
Date:	2005-07-10
Issue Date:	2010-04-15 10:31:46 (UTC+8)
Publisher:	N.Y.: Institute of Electrical and Electronic Engineers (IEEE)
Abstract:	The primary purpose of this research is to design and build up a test machine which provides a testing environment for semiconductor micro sensors made by micro-electro-mechanical systems (MEMS) technique. It combines computer auxiliary software SPARTAN into the global data-gathering system in addition to the main frame of the pressurized chamber. Different states of temperature and pressure subject to the testing of commercial pressure sensors was not only successfully achieved but the real-time sampling of the MEMS sensor output also worked well.
Relation:	Mechatronics, 2005. ICM '05. IEEE International Conference on, pp.805-810
DOI:	10.1109/ICMECH.2005.1529365
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Proceeding

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