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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/37940


    Title: Surface roughness of (110) orientation silicon base micro heat exchanger channel
    Other Titles: (110)矽晶材料微型熱交換器通道表面粗度研究
    Authors: Kang, Shung-wen;Chen, J. S.;Hung, J. Y.;Liu, W. C.
    Contributors: 淡江大學機械與機電工程學系
    Date: 1997-04-02
    Issue Date: 2010-01-11 14:22:45 (UTC+8)
    Relation: 7th international conterence on metrology and properties of engineering surfaces, Goteborg, Sweden, pp.268-273
    DOI: 10.1016/S0890-6955(97)00115-6
    Appears in Collections:[機械與機電工程學系暨研究所] 會議論文

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