Surface roughness of (110) orientation silicon base micro heat exchanger channel

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 會議論文 > Item 987654321/37940

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/37940

Title:	Surface roughness of (110) orientation silicon base micro heat exchanger channel
Other Titles:	(110)矽晶材料微型熱交換器通道表面粗度研究
Authors:	Kang, Shung-wen;Chen, J. S.;Hung, J. Y.;Liu, W. C.
Contributors:	淡江大學機械與機電工程學系
Date:	1997-04-02
Issue Date:	2010-01-11 14:22:45 (UTC+8)
Relation:	7th international conterence on metrology and properties of engineering surfaces, Goteborg, Sweden, pp.268-273
DOI:	10.1016/S0890-6955(97)00115-6
Appears in Collections:	[機械與機電工程學系暨研究所] 會議論文

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