English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 56557/90363 (63%)
造访人次 : 11843832      在线人数 : 139
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/37841


    题名: In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromachined acoustic wave sensor
    作者: Lee, Chi-yuan;Lee, Chi-yuan;Wu, Tsung-tsong;Chen, Yung-yu;Pao, Shih-yung;Chen, Wen-jong;Cheng, Ying-chou;Chang, Pei-zen;Chen, Ping-hei;Lee, Chih-kung;Dai, Ching-liang;楊龍杰;Yang, Lung-jieh;Yen, Kaih-siang;Xiao, Fu-yuan;Liu, Chih-wei;Lu, Shui-shong
    贡献者: 淡江大學機械與機電工程學系
    日期: 2003-05-04
    上传时间: 2010-04-15 10:29:57 (UTC+8)
    出版者: Piscataway: Institute of Electrical and Electronics Engineers (IEEE)
    摘要: This work presents a novel method based on the surface acoustic wave (SAW) device for monitoring in-situ the thickness of quartz membrane during batch chemical etching. Similar to oscillators and resonators, some SAW devices require the thickness of quartz membranes to be known precisely. Precisely controlling the thickness of a quartz membrane during batch chemical etching is important, because it strongly influences post-processing and frequency control. Furthermore, the proposed micromachined acoustic wave sensor, allows the thickness of a quartz membrane from a few μm to hundreds of μm to be monitored in-situ. In particular, the proposed method is highly appropriate for monitoring in-situ a few μm thick quartz membranes, because the thickness of a quartz membrane is proportional to the phase velocity. In summary, the proposed method for measuring the thickness of quartz membrane in real time, has high accuracy, is simple to set up and can be mass produced. Also described herein are the principles of the method used, the detailed process flows, the measurement set-up and the simulation and experimental results. The theoretical and measured values differ by an error of less than 2 μm, so the results agreed with each other closely.
    關聯: Proceedings of the 2003 IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, pp.993-1000
    DOI: 10.1109/FREQ.2003.1275226
    显示于类别:[機械與機電工程學系暨研究所] 會議論文

    文件中的档案:

    档案 描述 大小格式浏览次数
    1075-6787_p993-1000.pdf616KbAdobe PDF698检视/开启
    index.html0KbHTML230检视/开启

    在機構典藏中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈