本論文研究並設計ㄧ個自製微機電慣性量測組件驗證的環境。主要包含加速儀、陀螺儀的測試方法、無線資料傳輸系統的開發以及測試流程的建立：基於實驗平台的運動機構，分別設計出適合於加速儀及陀螺儀測試的動作，藉由理論的分析分別找出加速儀及陀螺儀於該動作下所應量得的理論值，並透過無線數據傳輸系統進行實驗數據的擷取，由實驗數據的分析來了解各感測元件的狀態並計算出角速度（加速度）與電壓之間的關係，最後再與使用手冊所提供的數據相互比較，以確定實驗結果的可靠。 我們針對所設計的測試動作建立最佳的實驗流程：加速儀測試、單軸陀螺儀測試及三軸陀螺測試；由單軸陀螺儀測試的結果我們可得角速度與電壓的關係式，接著進行三軸陀螺儀測試，將實驗結果代入我們所求出的關係式並與理論值進行比較，以了解實驗所得的關係式之適用性。 In this thesis, we developed a test bed for the in-house designed low cost MENS inertial measurement unit (IMU). The test system consists of a four-axis platform, a motion control computer, and a wireless data transmission system. We designed an adaptable test motion for the accelerometers and gyroscopes based on the mechanical structure of the platform. A promising test procedure for the accelerometer and gyroscope tests using the test bed is proposed. The relation between the measured value (AD count) and the angular velocity is established for each individual MEMS gyroscope.
A mathematic framework is also derived to verify the performance of the three-axis gyros (three single-axis MEMS gyros installed perpendicularly to provide three axes measurement). Experiment and analysis results are provided to show the effectiveness of the test bed.
