刀具輪廓形狀誤差係影響精密鑽石切削作業精度之主要因素。傳統刀具輪廓量測方式是以LVDT直接接觸刀具輪廓，量測出其形狀，該方式之量測精度取決於探針之解析度，一般介於1～10μm之間，然而在量測過程中極易因不當接觸造成鑽石刀具受損。 本研究在研發一套光學量測系統，利用影像處理技術，量測刀具輪廓，取代傳統刀具輪廓量測方式，改善解析度不足、無法線上量測之缺點。以現有之系統解析度（mm/pixel）仍無法滿足目前加工精度需求。本刀具輪廓量測系統，配合動差恒動法則，計算刀具輪廓至次像素（subpixel），依據刀具磨耗程度，即時補償輪廓誤差，能有效提升刀具輪廓量測精度。實驗證明本系統可將刀具輪廓量測誤差控制在 0.2μm以內。 Error of the tool profile is an important factor which affects the precision in ultra-precision diamond turning operation. Traditionally, the measure method of the tool profile is used LVDT directly to contact and detect the tool profile. But the precision of this method was depend on the resolution of probe which limited around 1~10μm. Additionally, it is running the risk of damaging the delicate tool tip. In this study, we proposed a new optical measurement method which can improve the disadvantages of traditional measurement method. It used the image processing technology combined moment-preserving principle, which can calculate the tool profile precision to sub-pixel. In addition, the wear of tool can be compensated on-line by this method and ensure the measurement precision of tool profile. From those experimental results showed the error of the tool profile can be controlled in the range of about 0.2μm.
