近年來在超精密加工機及半導體科技方面，對於精密定位系統主要的需求為增加精確度以及提高其重現性，而為了降低在系統中非線性之滯滑效應，因此發展出一氣潤式摩擦驅動裝置，並且在不同氣靜壓力和預壓下實驗條件下，進行平台之微觀動態特性分析；使用PID控制器於此閉迴路控制系統，並搭配解析度1nm之雷射光學尺來進行精密定位之量測，實驗結果顯示氣靜壓在3.5 kg/cm2時之定位誤差均方根值，在使用摩擦驅動預壓後自900nm大幅降低至20nm以內，而頻譜分析結果顯示誤差在9Hz and 23Hz處有較明顯之振幅。 Increased accuracy and higher repeatability for precision positioning systems have recently been the main requests in areas such as ultra-precision machine tools and semiconductor technologies. In order to minimize the non-linear stick-slip effect in the system, an air lubricated slide with capstan drive has been developed and the micro-dynamic characteristic of the stage was evaluated under different aerostatic slide pressure and preload. A PID controller was employed in the closed loop control system and an optic scale with 1nm resolution was used for precision position measuring. The results showed that the rms value of the measured noise was about 10nm. With the PID controller inactivated, it was found that the rms value of the error motion reduced significantly when the preload of capstan drive got activated (from around 900nm dropped to under 20nm in the case of 3.5 kg/cm2 air slide pressure). Frequency spectrum analysis indicated that the noise was higher at 9Hz and 23Hz.
