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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/35370


    Title: 低溫及低驅動電壓之微型熱挫曲式微幫浦分析與研製
    Other Titles: Analysis and fabrication of a novel valveless micropump with low- temperature thermo-buckled actuator
    Authors: 周禹廷;Chou, Yu-ting
    Contributors: 淡江大學機械與機電工程學系碩士班
    楊龍杰;Yang, Lung-jieh
    Keywords: 聚-對二甲苯;熱致動器;熱挫曲;微幫浦;無閥微幫浦;parylene;thermal-buckled;valve-less pump;actuator;Coventor Ware
    Date: 2008
    Issue Date: 2010-01-11 06:26:56 (UTC+8)
    Abstract: 本研究係使用模擬軟體CoventorWare,分析一parylene為主體材料的三明治結構,對其進行熱電耦合的分析。
    本文以改良由本研究群所研製之上電極式微幫浦於製作上諸多缺點,以在單一平面上加工之下電極式微幫浦,取代需要攀爬多層材料之上電極式微幫浦,以矽質材料作為底材,於晶圓背面施以濕蝕刻後,掏空濕蝕刻所形成之V型槽 (V-groove),以利電極做動裕度,並在晶圓正面上正光阻作為犧牲層(sacrificial layer)製作出一立體結構,利用parylene薄膜為結構層,來包覆住光阻犧牲層,在溶除光阻犧牲層後, 即完成一下電極式微幫浦。
    在輸入方波電壓並通以DI water 加以驅動後,成功地在製作之PDMS流道中量測到液體流量,而作動溫度不但未超過50℃,及最大流量更可達23.8 nl /min,期待能以此低溫運作之特性,使應用面更為廣闊。
    This study is using coventorware to simulate a sandwich structure whtich mold by parylene. We also use this software to design and thermoelectric coupling.
    This paper present the fabrication and analysis for a novel valveless micropump with working in a low temperature environment.We chose the parylene-c for the main material and success of production at an appropriate temperature which can drive a thermal actuating device. We Use TMAH to etch silicon wafer for the suspension pumping film, it may make a Application at a novel micropump. Under the scale of micrometers, not only can actuate under 40℃ but also provide the velocity about 23.8 nl /min. In the future, it also can transport pharmaceuticals by the microchannel system with micropumps.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

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