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    Title: 以聚-對二甲苯微機電技術製作之熱挫曲式微型致動器
    Other Titles: The thermo-buckled type actuators fabricated by parylene MEMS technology
    Authors: 林宏樺;Lin, Hung-hua
    Contributors: 淡江大學機械與機電工程學系碩士班
    楊龍杰;Yang, Lung-jieh
    Keywords: 聚-對二甲苯;熱挫曲;無閥幫浦;致動器;parylene;thermal-buckled;valve-less pump;actuator
    Date: 2005
    Issue Date: 2010-01-11 06:25:49 (UTC+8)
    Abstract: 本研究利用parylene C材料具備之低溫製程特性,以在晶圓上鍍著一層parylene C高分子薄膜開始,並使用正光阻AZ4620作為結構犧牲層(sacrificial layer),搭配無閥幫浦構型設計,包覆以parylene C高分子薄膜為結構層,再配合埋入金屬加熱電阻於parylene C高分子薄膜夾層之間(上、下厚度分別為0.5微米及1微米),最後以丙酮溶除流道或致動薄膜結構層下的犧牲層光阻,製成parylene C熱挫曲致動式中空腔體結構(microchamber),並成功觀察到其推動流體的情況。
    本研究採用之熱致動驅動方式,乃是利用加熱電阻造成薄膜膨脹變形,當薄膜受應變而生之負載超過結構發生挫曲最小負載時,致使薄膜發生挫曲,衍生出大變形,而對所建構之空腔結構內液體產生推擠,使薄膜有致動液體之效果。
    成功製作之熱挫曲式致動器(thermo-buckled type actuator),預期應用於無閥微型幫浦的製備,進行生醫流體或藥物之輸送。
    According to the characteristics of parylene, this thesis describes a new type of parylene micropump using the principle of thermo buckling. We first deposit the 1st layer of parylene C on the substrate wafer. Then, we use the photoresist AZ4620 as the sacrificial layer with the flow channel design of valve-less pump, and we deposit the 2nd layer of parylene C as the structured layer of the flow channel wall as well as the actuation membrane. We insert the metal heating electrodes between parylene C layers with different thickness (0.5μm、1μm). Finally, acetone is used to dissolve the photoresist sacrificial layer inside the parylene C structure, and fully fabricate the parylene C thermo-buckled type actuated microchamber structure. Besides, we successfully observe the actuation of the driving membrane subject to the fluid of DI water.
    The fabricated thermo-buckled type micropump can be integrated into the implantable biosensing system for microfludic driving, and drug delivery.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

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