本文以出平面制動器之研究為出發點，微飛行器（MAV, Micro Aerial Vehicle）之翼面控制為構想，模仿蕨類植物孢子囊細胞因環境濕度變化所引起之開合運動，設計並製作出新一代透過表面張力驅動之孔雀開屏式（peacock-like）微型控制鉸鏈。 為預防微型控制鉸鏈作動時，因驅動結構本身剛性不足而造成型變區 域不在預設範圍內，故本文採用具有高楊式模數且易於製作之SU-8 厚膜負光阻為材料，搭配黃光微影製程，製作出質輕且具控制力之出平面制動器，隨後並實際以微飛行器翼膜材質之聚對苯二甲酸乙二醇酯膜接合本微型控制鉸鍊，搭配工作液體進行噴霧驅動測試，驗證應用於微飛行器之可行性。 最後，盼望所製作出之微型控制鉸鏈，其控制翼面之構想最終能實際 應用整合於微機電系統領域，如微飛行器甚至奈米級飛行器（NAV, Nano Aerial Vehicle），在控制元件上提供一新選擇。 On the basis of controlling the flight attitude of MAVs, the author presents a biomimetic out-of-plane actuator which imitates the behaviors of fern sporangia after various humidity. We designed and fabricated an innovative peacock-like micro hinge which adopts surface tension as the driving force. To prevent this micro hinge be out of our expecting range due to its inadequate stiffness, this study chose SU-8 negative photoresist which has high Yang modulus as the material and fabricated a light but wellcontrolled out-of-plane micro actuator by photolithography process. Subsequently, we attached this device to the PET film and testing its feasibility to MAVs by spraying working liquid on the micro hinge. Finally, we hope the novel idea of mounting and controlling the flight attitude can be integrated to MEMS technology and applied to flapping MAV or even NAV in the future.
