完成的晶片通以直流電壓25V，可成功驅動無水酒精，體積流率達4.5 μl/min；預期此晶片可應用於離子牽引式幫浦(ion drag pump)。 This paper proposes a low-temperature and non-planar process to fabricate spiral electrodes on the inner surface of a SU-8 circular microchannel. The fabrication process can be divided into two parts.
First, the Ti/Au electric seeding layer was deposited on the cylindrical surface of a glass capillary with 350μm diameter by an E-beam evaporator. After doing a rolling exposure process by adjusting the rotation speed of the glass capillary according to the proper UV dosage and using suitable etchants respectively, the author formed the continuous gold spiral electrodes around the glass capillary. Moreover, by electroplating nickel layers of 5μm thick to improve the strength of electrodes, the nickel spiral electrodes can be achieved on the outer surface of the glass capillary successfully.
Second, SU-8 photoresist was coated all over the above workpiece as a structure for the circular microchannel, then the glass capillary was removed by HF acid. Therefore, the nickel spiral electrodes were transferred to the inner surface of the SU-8 circular microchannel.
The complete chip experimentally drives the ethyl alcohol to have the volumetric flow rate of 4.5 μl/min by applying a DC voltage of 25V, and can be applied as an ion drag micropump.
