本研究利用ANSYS分析軟體模擬蒸汽腔體均熱片之應力分析，模擬四個圓柱燒結之均熱片，均熱片尺寸為54mm×54mm×6mm，圓柱直徑為4mm，改變其圓柱離中心位置的距離以及擺放之角度，探討圓柱擺放角度位置與應力應變之關係。模擬分成兩種不同假設條件，條件一：熱量100W、強制對流係數300W/m2、均佈壓力12.5kg；條件二：內部80℃與100℃飽和蒸汽壓、均佈壓力12.5kg，分別針對三種不同圓柱角度位置以及兩種加熱面積30 mm × 30mm和14 mm × 14 mm進行分析比較。 分析結果，在條件一情況下，45°擺放角度在圓柱距離中心9√2 (12.728 mm)之位置為變形量最小的地方；在條件二情況下，45°擺放角度在圓柱距離中心11√2 (15.556 mm)為變形量較小之位置，80℃時之飽和壓力與加熱面30 mm × 30 mm是較小變形量之設定條件。依擺放角度所得之變形量大小順序為0°，30°，45°。分析較佳結果改變其內部腔體厚度，壁厚厚度越薄，變形量與應力均有增大之趨勢。 The purpose of this thesis is to investigate the stress analysis of vapor chamber heat spreaders. Various positions and angles of four sintered columns were investigated to analyze the relationship between the stresses and strains of vapor chamber by ANASYS. The vapor chamber has a dimension of 54 mm × 54 mm × 6 mm, and the diameter of sintered columns is 4 mm. Two assumptions are made in conducting the analysis. Various angles (0°, 30° and 45°) and two heating area (30 mm × 30 mm and 14 mm × 14 mm) were investigated the influence of stresses and strains on vapor chamber. The first assumption includes the heat flux is 100 W, force convection coefficient is 300 W/m2 and the clamping pressure between the vapor chamber and the heat sink was maintained at 12.5 kgf. The result shows that the minimal displacement is located at 9√2 (12.728 mm) and 45° from the center of vapor chamber. The second assumption contains the clamping pressure is 12.5 kgf and the saturated vapor pressure which is corresponding to the saturated temperature at the 80℃ and 100℃. It shows that the minimal displacement is located at 11√2 (15.556 mm) while saturated vapor pressure at 80℃ which is 47390 pa and heating area are 30 mm × 30 mm. In addition, the effect of various angle on displacement are found that the maximum and minimal displacement are 0° and 45°, respectively. Based on above results, the displacement and stress are increasing with decreasing the thickness of vapor chamber.