由於光電與半導體產業的蓬勃發展，有機溶劑的需求便隨之逐年增加，對於這些產業而言，如何減少有機溶劑的消耗支出以促進相關產業發展已經是刻不容緩的問題。其中，在有限石化原料的限制下，溶劑回收技術則是一項綠色永續的解決方法。甲基吡咯酮(NMP)是一種高價值的溶劑，常被應用於光電產業中的清洗程序。本研究旨在使用薄膜蒸餾技術去除NMP水溶液中之水分以改善傳統蒸餾法高熱量的需求。本研究使用了攪拌式薄膜蒸餾模組取得薄膜係數經驗公式，再以平板式薄膜蒸餾模組，利用所求得之薄膜係數經驗公式進行實驗數據的取得及理論模擬。關於平板式薄膜蒸餾數學模擬部分，本研究推導出其二維的溫度分佈式，再以有限差分將偏微分方程組簡化成聯立常微分方程組，最後利用四階Runge-Kutta數值方法求解，得到通道內的溫度分佈及理論透膜通量，並與實驗比較。其中，飽和溶液之飽和蒸氣壓在不同溶液組成及溫度下的組成是以UNIFAC法估計。本研究探討在固定冷流體溫度下，不同溶液濃度、攪拌速度、溶液體積流率及進口流體溫度對透膜通量與溫度極化係數之影響。結果顯示，透膜通量會隨著溶液濃度升高、流體體積流率降低、熱端進口溫度降低及攪拌速度降低而減少，同時，溫度極化係數會越偏離1。 Since requirements of solvents are increasing year by year in electronic industries such as TFT-LCD and semiconductor industries, therefore, the decrease in expenditure of solvent consumption is of great urgency to encourage industrial development. The organic solvent recovery technologies are the important green strategy in the near future due to the finite fossil energy. NMP (N-methyl Pyrrolidone) is a valuable solvent for washing integrated circuit in electronic industries. The traditional distillation process with distillation tower is more and more unfeasible to deal with high boiling point NMP solution as a result of the high energy cost. The purpose of this study is to model the dehumidification of aqueous NMP solution after washing integrated circuit process using direct contact membrane distillation (DCMD). Stirred and flat-plate DCMD devices are developed for obtaining membrane coefficient correlation and verifying mathematical modeling, and thus, a pair of two-dimensional conjugated partial differential equations by making energy balance was derived. The conjugated partial differential equations (PDEs) can be transformed into an ordinary differential equations (ODEs) system using finite difference technique and then solved using the fourth-order Runge-Kutta method. The activity coefficient on NMP/water mixture can be estimated by UNIFAC method to obtain the partial pressure of non-ideal binary mixture in the gas phase for predicting the vapor flux across membrane. The influences of solution concentration, stirred speed, solution volumetric flow rate, and inlet solution temperature under fixed cold stream temperature on the mass flux across the membrane and separation efficiency are also discussed.
