淡江大學機構典藏:Item 987654321/32538
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    題名: 鑽石薄膜的應用
    其他題名: Application of CVD diamond film
    作者: 林伯霖;Lin, Bo-lin
    貢獻者: 淡江大學物理學系碩士班
    林諭男;Lin, I-nan
    關鍵詞: 鑽石薄膜;熱傳導;場發射;CVD;diamond film;field emission
    日期: 2007
    上傳時間: 2010-01-11 02:17:57 (UTC+8)
    摘要: 本實驗是以ASTEX 5400鍍膜系統和IPLAS MPCVD System，在經過黃光處理的矽基板上，分別成長大小為2mm、4mm、6mm、8mm的MCD(Micro Crystalline Diamond)和UNCD(Ultra-nanocrystalline Diamond)之鑽石角錐(Diamond Tip)，然而，使用NETZSCH LFA-457和Hot Disk來量測在不同成長參數下鑽石薄膜的熱擴散係數(Thermal Diffusivity)和熱傳導係數(Thermal Conductivity)，最後，利用二極式(diode measurement)場發射量測法來量測鑽石角錐和鑽石薄膜(diamond film)間的場發射(Field Emission)效果上的差異。
    在熱傳導係數的量測所得到的結果上可得知:其熱傳導係數會隨著厚度的增加而隨之遞增，且不同尺寸的鑽石角錐也會影響到其熱傳導係數的量測，其中以8mm的鑽石角錐所量測到的熱傳導係數是優於其他角錐尺寸的，然而，在摻雜硼方面，其熱傳導係數是優於未摻雜硼的熱傳導係數，但相較於文獻上的比對，其造成如此的真實原因如今還不是很明確。
    於場發射的量測結果上，從實驗數據上可明顯的發現角錐的場發射效果遠優於薄膜面的場發射效果，透過β值(電場增強因子)的運算，角錐的β值均優於相同成長條件下的薄膜面的β值，另外，也可從量測數據上觀測可知:不同尺寸的鑽石角錐，存在著不同的場發射效果，從F-N圖則可清楚的比較出:2mm鑽石角錐的場發射效果均優於其他尺寸的角錐，具有較高的β值，相對的，存在較低的有效功函數。
    Abstract: This study aims to grow diamond tips of MCD(Micro Crystalline Diamond) and UNCD(Ultra-nanocrystalline Diamond) in 2mm, 4mm, 6mm, and 8mm based on yellow light-processed silicon substrate with ASTEX 5400 and IPLAS MPCVD System, to measure the thermal diffusivity and thermal conductivity of diamond films which grow in different parameters with NETZSCH LFA-457and Hot Disk, and to measure the differences of effects of field emission between diamond tips and diamond films with diode measurement.
    According to the results of the measurement of thermal conductivity, it is obtained that the thermal conductivity increases progressively with the increase of the thickness of diamond films; moreover, diamond tips in different sizes also influence the measurement of thermal conductivity. Among the diamond tips in various sizes, the diamond tips in 8mm are measured as possessing the highest thermal conductivity. As for the diamond tips in boron-doped cases, it is found that the boron-doped diamond tips possess higher thermal conductivity; this finding is inconsistent to similar experiments in other studies and the reason for causing the present result still needs to be discovered.
    As for the results of the measurement of field emission, it is obtained that the effects of field emission of diamond tips are significantly better than those of the diamond films. Moreover, the βdata of diamond tips are also better than those of the diamond films which grow in identical situations. Furthermore, it is observed that diamond tips in different sizes have different effects of field emission. Plot F-N clearly shows that the diamond tips in 2mm have better effects of field emission than the diamond tips in other sizes, possess higherβdata, and comparatively obtain lower effective working functions.
    顯示於類別:[物理學系暨研究所] 學位論文

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