淡江大學機構典藏:Item 987654321/32526
English  |  正體中文  |  简体中文  |  Items with full text/Total items : 54059/88894 (61%)
Visitors : 10549628      Online Users : 27
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/32526


    Title: X光吸收光譜對氮與硼摻雜奈米鑽石薄膜之研究
    Other Titles: X-ray absorption spectroscopy study of nitrogen- and boron-doped nanocrystalline diamond (NCD) thin films
    Authors: 邱晉儀;Chiu, Chin-yi
    Contributors: 淡江大學物理學系碩士班
    張經霖;Chang, Ching-lin
    Keywords: X光吸收光譜;奈米鑽石;XANES;NCD;Nanocrystalline Diamond
    Date: 2006
    Issue Date: 2010-01-11 02:17:05 (UTC+8)
    Abstract: 本論文研究以偏壓輔助微波電漿化學氣相沈積法(MPECVD),在矽的基板上所合成的P型與N型半導化的奈米鑽石薄膜。 X光吸收近邊緣結構(X-ray Absorption Near Edge Structure),對奈米鑽石薄膜之鍵結與電子結構來做分析,並找出摻雜元素在奈米鑽石膜中所造成的的影響。
    我們發現在微米鑽石系列與奈米鑽石系列,在掺雜氮(或硼)時,sp2與sp3變化會因晶粒尺寸改變,此現象對應到場發射特性上,可以推測微米鑽石系列與奈米鑽石系列掺雜機制不同,場發射改善的原因也不同,在此論文中我們將深入討論。
    Nitrogen- and Boron-doped Nanocrystalline Diamond (NCD) Thin Films were deposited on silicon substrate using a Microwave plasma-enhanced chemical vapor deposition (MPECVD) method. X-ray absorption near-edge structure (XANES), measurements have been performed chemical structure and bonding configuration for a variety of Nitrogen- doped、Boron-doped and undoped Nanocrystalline diamond Thin films.
    We find that sp2 and sp3 in microcrystalline diamond series and
    Nanocrystalline diamond series are different, when the grain size is reducing. The phenomenon is corresponding to the field emission properties. We suggest that doping in MCD and NCD have different mechanism. We will discuss in this paper.
    Appears in Collections:[Graduate Institute & Department of Physics] Thesis

    Files in This Item:

    File SizeFormat
    0KbUnknown501View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.


    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback