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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/32526

    Title: X光吸收光譜對氮與硼摻雜奈米鑽石薄膜之研究
    Other Titles: X-ray absorption spectroscopy study of nitrogen- and boron-doped nanocrystalline diamond (NCD) thin films
    Authors: 邱晉儀;Chiu, Chin-yi
    Contributors: 淡江大學物理學系碩士班
    張經霖;Chang, Ching-lin
    Keywords: X光吸收光譜;奈米鑽石;XANES;NCD;Nanocrystalline Diamond
    Date: 2006
    Issue Date: 2010-01-11 02:17:05 (UTC+8)
    Abstract: 本論文研究以偏壓輔助微波電漿化學氣相沈積法(MPECVD),在矽的基板上所合成的P型與N型半導化的奈米鑽石薄膜。 X光吸收近邊緣結構(X-ray Absorption Near Edge Structure),對奈米鑽石薄膜之鍵結與電子結構來做分析,並找出摻雜元素在奈米鑽石膜中所造成的的影響。
    Nitrogen- and Boron-doped Nanocrystalline Diamond (NCD) Thin Films were deposited on silicon substrate using a Microwave plasma-enhanced chemical vapor deposition (MPECVD) method. X-ray absorption near-edge structure (XANES), measurements have been performed chemical structure and bonding configuration for a variety of Nitrogen- doped、Boron-doped and undoped Nanocrystalline diamond Thin films.
    We find that sp2 and sp3 in microcrystalline diamond series and
    Nanocrystalline diamond series are different, when the grain size is reducing. The phenomenon is corresponding to the field emission properties. We suggest that doping in MCD and NCD have different mechanism. We will discuss in this paper.
    Appears in Collections:[Graduate Institute & Department of Physics] Thesis

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