淡江大學機構典藏:Item 987654321/32510
English  |  正體中文  |  简体中文  |  Items with full text/Total items : 64176/96941 (66%)
Visitors : 9106995      Online Users : 12659
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
    •  Adv. Search
    Home ‧ Login ‧ Upload ‧ Help ‧ About ‧ Administer Goto mobile version


    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/32510


    Title: 氮化銦鎵/氮化鎵多層膜之X光研究
    Other Titles: Study of InGaN/GaN multilayer using X-ray.
    Authors: 歐致先;Ou, Chih-hsien
    Contributors: 淡江大學物理學系碩士班
    杜昭宏;Du, Chao-hung
    Keywords: X光反射率;XRR;XRD
    Date: 2008
    Issue Date: 2010-01-11 02:15:25 (UTC+8)
    Abstract: 本論文是利用X光繞射(XRD)和X光反射率法(XRR)，對以InGaN/GaN為多層量子井(MQW)的多層膜樣品，成長在Al2O3為基底(0 0 1)方向來做研究。利用這兩種測量法不只可以清楚地量測到多層量子井中各層厚度，也可以確定InxGal-xN之中的摻雜度。在XRD擬合分析中得知在MQW厚度分別為142.15nm (607)、144.75nm (608) 和148.81nm (609)，和理論計算值142.6nm (607)、145.7nm (608) 、145.7nm (609)非常接近，而使用XRR的擬合分析結果也大致跟XRD相符。
    X-ray diffraction (XRD) and X-ray reflectivity (XRR) are used to characterize the structure of the InGaN/GaN multiple quantum wells (MQWs) grown on the Al2O3 (0 0 1) substrate .Using these measurements, not only the layered structure of the MQWs is revealed clearly but also the In content χ of the InxGal-xN component can be determined reliably. The fitted results of XRD show that MQW widths are around 142.15nm (607), 144.75nm (608) and 148.81nm (609) that are very lost to the theoretical calculation as 142.6nm (607), 145.7nm (608) and 145.7nm (609).the data obtained from the reflectivity (XRR) measurements are in agreement with that obtained from XRD.
    Appears in Collections:[Graduate Institute & Department of Physics] Thesis

    Files in This Item:

    File SizeFormat
    0KbUnknown346View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback