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    题名: X-ray absorption spectroscopy (XAS) study of dip deposited a-C:H(OH) thin films
    作者: Ray, S.C.;Tsai, H.M.;Chiou, J.W.;Bose, B.;Jan, J.C.;Kumar, Krishna;Pong, W.F.;Dasgupta D.;Tsai, M. H.
    贡献者: 淡江大學物理學系
    关键词: Absorption spectroscopy;Carbon;Decomposition;Friction;High temperature effects;Hydrogenation;X ray photoelectron spectroscopy;X ray spectroscopy;Carbon phases;X-ray absorption near-edge structures (XANES);X-ray absorption spectroscopy (XAS);Thi
    日期: 2004-08
    上传时间: 2013-06-13 11:23:42 (UTC+8)
    出版者: Temple Way: Institute of Physics (IOP)
    摘要: This work measures the C and O K-edge x-ray absorption near-edge structure (XANES) spectra of hydrogenated amorphous carbon (a-C:H) films deposited at various baking temperatures Tb (Tb = 300–500 °C at 50 °C). The C–H σ* peak related to the content of the sp2 graphite-like bonding in the C K-edge spectra was found to yield to the C–H π* peak related to the sp3 diamond-like bonding at high temperature (500 °C). We find that the intensities of both the sp2 and sp3 features in the C K-edge XANES spectra decrease with increase of Tb, which suggests an increase of the defect concentration with Tb. The intensities of the O K-edge XANES spectra are found to decrease with increase of Tb, which suggests thermally induced decomposition of carbonyl contaminants on the surface. The elemental analysis C/O (or O/C) ratio was obtained from XPS spectra and indicates that films are not hydrogenated amorphous carbon but rather oxyhydrogenated amorphous carbon thin films.
    關聯: Journal of Physics Condensed Matter 16(32), pp.5713-5719
    DOI: 10.1088/0953-8984/16/32/008
    显示于类别:[物理學系暨研究所] 期刊論文

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