Deposition and characterization of diamond-like carbon thin films by electro-deposition technique using organic liquid

doi:10.1557/JMR.2004.0146

淡江大學機構典藏 > 理學院 > 物理學系暨研究所 > 期刊論文 > Item 987654321/27593

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题名:	Deposition and characterization of diamond-like carbon thin films by electro-deposition technique using organic liquid
作者:	Ray, S. C.;Bose, B.;Chiou, J. W.;Tsai, H. M.;Jan, J. C.;Kumar, Krishna;彭維鋒;Pong, W. F.;DasGupta, D.;Fanchini, G.;Tagliaferro, A.
贡献者:	淡江大學物理學系
关键词:	Electro-deposition;Raman spectra;X-ray absorption near edge structure (XANES) spectra
日期:	2004-04
上传时间:	2009-12-31 10:28:02 (UTC+8)
出版者:	New York: Cambridge University Press
摘要:	Diamond-like carbon films were synthesized by electro-deposition technique from an organic liquid (a solution of alpha- and beta-pinenes in n-hexane) on silicon substrate at room temperature and at room pressure. The x-ray diffraction (XRD), Fourier-transform infrared (FTIR) spectra, Raman spectra, photoluminescence (PL), and x-ray absorption near edge structure (XANES) spectra analysis were used to study the properties of the diamond-like carbon (as-deposited and annealed) films. The XRD measurement indicated that the film contains some diamond-crystalline phases whereas Raman spectra did not show any prominent diamond-like peak. PL intensity as higher for the as-deposited film and decreased with high-temperature vacuum annealing. FTIR spectra showed the presence of sp3 hybridization C–H bonds and their intensity decreases at higher annealing temperature. C and O K-edge XANES spectra showed that π* (sp2) intensity significantly decreases when the annealing temperature is 600 °C.
關聯:	Journal of Materials Research 19(4), pp.1126-1132
DOI:	10.1557/JMR.2004.0146
显示于类别:	[物理學系暨研究所] 期刊論文

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