English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 60932/93629 (65%)
造访人次 : 1249794      在线人数 : 9
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/27528


    题名: Enhancement of Si-O hybridization in low-temperature grown ultraviolet photo-oxided SiO2 film observed by x-ray absorption and photoemission spectroscopy
    作者: Tsai, H. M.;Ray, S. C.;Pao, C. W.;Chiou, J. W.;Huang, C. L.;Du, C. H.;Pong, W. F.;Tsai, M.-H.;Fukano, A.;Oyanagi, H.
    贡献者: 淡江大學物理學系
    关键词: bond lengths;high-k dielectric thin films;permittivity;photoelectron spectra;silicon compounds;valence bands;XANES
    日期: 2008-01
    上传时间: 2010-08-10 09:48:31 (UTC+8)
    出版者: College Park: American Institute of Physics
    摘要: The dielectric properties associated with the electronic and bonding structures of SiO2 films were examined using the Si L3,2- and O K-edge x-ray absorption near-edge structures (XANES) and valence-band photoemission spectroscopy (VB-PES) techniques. The Si L3,2- and O K-edge XANES measurements for the low-temperature grown UV-photon oxidized SiO2 (UV-SiO2) and the conventional high-temperature thermal-oxidized SiO2 (TH-SiO2) suggest enhancement of O 2p–Si 3p hybridization in UV-SiO2. VB-PES measurements reveal enhancement of nonbonding O 2p and O 2p–Si 3p hybridized states. The enhanced O 2p and Si 3p hybridization implies a shortening of the average Si–O bond length, which explains an increase of the density and the improvement of the dielectric property of UV-SiO2.
    關聯: Journal of Applied Physics 103(1), pp.013704(4 pages)
    DOI: 10.1063/1.2828144
    显示于类别:[物理學系暨研究所] 期刊論文

    文件中的档案:

    档案 描述 大小格式浏览次数
    0021-8979_103(1)p013704.pdf349KbAdobe PDF640检视/开启
    index.html館藏資訊0KbHTML208检视/开启

    在機構典藏中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈