Thick PNN-PZT films, about 25 μm, were successfully prepared by combining the screen printing and laser lift-off techniques. PNN-PZT films screen printed on sapphire substrate, after sintering at 1200°C (3 h), are secondary free perovskite, possessing good ferroelectric properties (Pr = 16.4 μC/cm2, Ec = 12.6 kV/cm). Silver-bonding and laser lift-off processes can successfully transfer the PNN-PZT films from the sapphire to silicon substrates, maintaining ferroelectric properties. The resulted PNN-PZT/Si thick films possess larger electrical polarization: (Pr = 16.5 μ C/cm2) with slightly larger coercive field (Ec = 24.6 kV/cm).
