Growth, characterization, optical and X-ray absorption studies of nano-crystalline diamond films

doi:10.1016/S0925-9635(99)00355-6

機構典藏 > College of Sciences > Graduate Institute & Department of Physics > Journal Article > Item 987654321/27479

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/27479

Title:	Growth, characterization, optical and X-ray absorption studies of nano-crystalline diamond films
Authors:	Chen, L. C.;Wang, T. Y.;Yang, J. R.;彭維鋒;Pong, W. F.
Contributors:	淡江大學物理學系
Keywords:	Microwave CVD;Nano-diamond film;Optical transmittance;Transmission electron microscopy;X-ray absorption
Date:	2000-03-01
Issue Date:	2009-12-31 10:11:25 (UTC+8)
Publisher:	Elsevier
Abstract:	We report here the growth of thin diamond films, with an average grain size ranged from 3.6 nm to 5 μm, by microwave plasma enhanced chemical vapor deposition via different substrate pretreatment and varying methane fraction in the source gas. Specifically, the substrate pretreatment involved using two different grain sizes, 4 nm and 0.1 μm, of the diamond powder for ultrasonic agitation. Transmission electron microscopy, optical transmission spectra, and X-ray absorption spectra have been employed to characterize the resultant films. For each film, the grain size distribution was obtained by directly analyzing the dark-field images of the film. For films deposited with 0.1 μm diamond powder pretreatment, the grain size of the film decreased as the methane fraction increased. The opposite trend was observed for 4 nm diamond powder pretreated films. X-ray absorption spectra at the C K-edge showed clear bulk diamond excitonic and sp3 features with little evidence of sp2 bonding even for films with an average grain size as low as 3.6 nm. Furthermore, a blue shift of the exciton state and conduction band edge was observed with the decrease of the grain size of the film, indicating a quantum confinement effect. On the other hand, no direct relationship between the grain size of the film and the optical transmission was observed. The key parameter that dictated the optical transparency of the film was the surface roughness provided that the film maintained high sp3 content.
Relation:	Diamond and Related Materials 9(3-6), pp.877-882
DOI:	10.1016/S0925-9635(99)00355-6
Appears in Collections:	[Graduate Institute & Department of Physics] Journal Article

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