Correlation between electron field emission property and in situ plasma spectroscopy for carbon nanotubes synthesized by using MPECVD method

doi:10.1016/j.diamond.2005.11.043

淡江大學機構典藏 > 理學院 > 物理學系暨研究所 > 期刊論文 > Item 987654321/27475

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题名:	Correlation between electron field emission property and in situ plasma spectroscopy for carbon nanotubes synthesized by using MPECVD method
作者:	鄭秀鳳;Cheng, Hsiu-fung;Li, Chen-liang;Chen, Yu-wen;林諭男;Lin, I-nan
贡献者:	淡江大學物理學系
关键词:	Carbon nanotubes;Electron field emission;MPECVD;In situ plasma spectroscopy
日期:	2006-04
上传时间:	2009-12-31 10:11:09 (UTC+8)
出版者:	Lausanne: Elsevier S.A.
摘要:	Carbon nanotubes (CNTs) were grown on Fe needle by a modified microwave plasma enhanced chemical vapor deposition (MPECVD) process, in which the plasma was induced in the vicinity of the tip of Fe needle through the interaction of microwave and Fe needles. The spectra of plasma were in situ examined, indicating that Ar / CH4 ratio and total pressure remarkably affect the characteristics of the plasma spectra, which, in turn, correlated intimatedly with the electron field emission properties of CNTs. The presence of singly ionized carbons (CII) in the plasma is presumed to be the main factor facilitating the growth of CNTs, possessing good electron field emission properties. The maximum electron field emission current density is 8 mA/cm2 for carbon nanotubes grown at 10% CH4 and 300 Torr total pressure. The corresponding turn-on field (Eo) is 20 V/μm. Restated, the electron field emission properties of CNTs can be optimized by controlling the spectral characteristics of plasma.
關聯:	Diamond and Related Materials 15(4-8), pp.859-862
DOI:	10.1016/j.diamond.2005.11.043
显示于类别:	[物理學系暨研究所] 期刊論文

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