A series of aryltriethoxysilanes was synthesized from the reaction mixture of aryl bromide, Mg powder, 1,2-dibromoethane and tetraethyl orthosilicate in THF under ultrasound. This sonochemical Barbier-type reaction provides a simple and efficient method for preparation of aryltriethoxysilanes. The Hiyama cross-coupling reaction of phenyltriethoxysilane with bromobenzene was investigated under different palladium catalysts and Pd(PhCN)2Cl2 was found to be the best choice.