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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/127942


    Title: Vacuum-chamber type capacitive micro pressure sensor using CMOS-MEMS
    Authors: Yang, C. Tasupalli；D.-Y. Jiang；W.-C. Wang；L.-J.
    Date: 2025-08-20
    Issue Date: 2025-09-23 12:07:01 (UTC+8)
    Relation: Proc. of ICIUS 2025
    Appears in Collections:[機械與機電工程學系暨研究所] 會議論文

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