淡江大學機構典藏:Item 987654321/122165
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    题名: A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications
    作者: Shih, Horng-Yuan;Hsin, Chin-Te;Yang, Cheng-Wei;Chen, Hsin-Liang;Kuo, Jhe-Yuan
    关键词: CMOS MEMS;pressure sensor;blood pulse
    日期: 2021-11-16
    上传时间: 2022-02-15 12:16:04 (UTC+8)
    摘要: A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated with the MEMS sensor. The capacitive MEMS sensor has a sensitivity of 6.53 fF/kPa with a sensing range of 4-40 kPa (30-300 mmHg). The overall system has a measured conversion gain of 4.72 mV/kPa. The power dissipation of the whole circuit is only 6.46 μW.
    DOI: 10.1109/ISPACS51563.2021.9651137
    显示于类别:[電機工程學系暨研究所] 會議論文

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