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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/119242

    Title: Fabrication Method of Nanoimprint Mold Core
    Authors: Lin, Ching-Bin;Cheng, Pao-Yu;Lin, Hung-Yi
    Date: 2005-01-14
    Issue Date: 2020-09-24 12:12:22 (UTC+8)
    Abstract: A fabrication method of a nanoimprint mold core includes providing a Substrate having a photo phase change Surface; performing a phase change on the photo phase change Surface to form at least one first area and at least one second area; at least partially removing the first area to form a nano pattern; performing an imprinting process using the Sub strate having the nano pattern; and performing a mold release process So as to obtain the mold core. This achieves the advantages of low cost, high yield, and easy fabrication of the mold core.
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Patent

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