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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/119225

    Title: Microfabrication process for making microstructures as geometrically miniaturized from three-dimensional orientations
    Authors: Lin, Ching-Bin
    Date: 1999/11/02
    Issue Date: 2020-09-24 12:11:46 (UTC+8)
    Abstract: A microfabrication process comprises the swelling of at least a hydrophilic polymer in order for shrinking each cavity size of a micromachined microstructure pattern from three-dimensional orientations, whereby upon filling or deposition of metal into each cavity of the pattern when performing an electroforming step, a supermini microstructure with slim, fine, thin and small size can be obtained as geometrically miniaturized from three-dimensional orientations.
    Appears in Collections:[機械與機電工程學系暨研究所] 專利

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