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    請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/118754


    題名: Study on thermoelectric property optimization of mixed-phase bismuth telluride thin films deposited by co-evaporation process
    作者: Yen-Ju Wu;Shih-Chieh Hsu;Ya-Cheng Lin;Yibin Xu;Tung-Han Chuang;Sheng-Chi Chen
    關鍵詞: Bi2Te3;Thermoelectric properties;Co-evaporation;Thin films;Mixed phases
    日期: 2020-07-25
    上傳時間: 2020-06-02 12:10:13 (UTC+8)
    摘要: The development of Bi2Te3 thin films has huge potential in the pursuit of efficient thermoelectric micro/na-
    nodevices due to their high Seebeck coefficient, high electrical conductivity and low thermal conductivity. The

    optimization of experimental parameters of Bi-Te thin films produced by co-evaporation will be investigated in
    this study. Co-evaporation is a low cost, easy-to-control process which can be used for high throughput and is

    scalable. We found that an optimal Te/Bi ratio of 1.5 with good thermoelectric properties can be directly syn-
    thesized by Bi and Bi2Te3 co-evaporation. Compared to the conventional Bi/Te co-evaporation process, high

    temperature annealing or substrate heating is not necessary for the process mentioned in this paper, which is a
    desirable feature when using polymer-based substrates, organic/inorganic hybrid thermoelectric generators, and
    flexible devices since they have relatively low tolerance to heat. The optimized Bi2Te3 thin films, which are
    mixed phases of Bi2Te3, Bi3Te4 and Te, possess high carrier concentration (6.65 × 1020 cm−3), low electrical
    resistivity (3.17 × 10−3 Ωcm), and extremely low thermal conductivity (0.59 W/mK) at room temperature on a
    smooth surface (roughness <5.5 nm) and are achieved by adjusting the deposition rate of Bi and Bi2Te3. The
    correlation between the structures of mixed phases, electrical and thermal properties will be discussed in detail.
    關聯: Surface & Coatings Technology 394, 125694
    DOI: 10.1016/j.surfcoat.2020.125694
    顯示於類別:[化學工程與材料工程學系暨研究所] 期刊論文

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