Optical touch trigger probing sensor for micro CMMs

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 會議論文 > Item 987654321/116277

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/116277

Title:	Optical touch trigger probing sensor for micro CMMs
Authors:	Wu, C.C.;Hsu, C.C.;Lee, J.Y.;Chiu, W.T.
Keywords:	Optical Touch Trigger Probing Sensor for Micro CMMs
Date:	2012-07-02
Issue Date:	2019-04-20 12:10:41 (UTC+8)
Abstract:	The optical touch trigger probing sensor integrates the fiber Bragg grating technology and the optical interferometry. Experimental results demonstrate the proposed sensor is with high resolution and isotropic pretravel of 23 nm.
Relation:	Proceedings of 2012 International Conference on Optics-Photonics Design and Fabrication
Appears in Collections:	[機械與機電工程學系暨研究所] 會議論文

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