淡江大學機構典藏:Item 987654321/116036
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    题名: Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
    作者: Chang-Yuan Chen;Cheng-Chih Hsu;Chyan-Chyi Wu;Ching-Liang Dai
    关键词: Sodium chloride concentration;nanowire device;n-type dopant;reusable
    日期: 2018-03
    上传时间: 2019-03-20 12:10:54 (UTC+8)
    摘要: This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.
    關聯: International Journal of Materials Science and Engineering 6(1), p.18-22
    DOI: 10.17706/ijmse.2018.6.1.18-22
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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