Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/116036

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Title:	Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
Authors:	Chang-Yuan Chen;Cheng-Chih Hsu;Chyan-Chyi Wu;Ching-Liang Dai
Keywords:	Sodium chloride concentration;nanowire device;n-type dopant;reusable
Date:	2018-03
Issue Date:	2019-03-20 12:10:54 (UTC+8)
Abstract:	This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.
Relation:	International Journal of Materials Science and Engineering 6(1), p.18-22
DOI:	10.17706/ijmse.2018.6.1.18-22
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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