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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/116036


    Title: Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
    Authors: Chen, Chang-Yuan;Hsu, Cheng-Chih;Wu, Chyan-Chyi;Dai, Ching-Liang
    Keywords: Sodium chloride concentration;nanowire device;n-type dopant;reusable
    Date: 2018-03
    Issue Date: 2019-03-20 12:10:54 (UTC+8)
    Abstract: This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.
    Relation: International Journal of Materials Science and Engineering 6(1), p.18-22
    DOI: 10.17706/ijmse.2018.6.1.18-22
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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