Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/116035

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題名:	Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film
作者:	Yu-Wei Chen;Chyan-Chyi Wu;Cheng-Chih Hsu;Ching-Liang Dai
關鍵詞:	thermoelectric;microgenerator;CMOS-MEMS;carbon nanocapsules
日期:	2018-06-27
上傳時間:	2019-03-20 12:10:51 (UTC+8)
摘要:	Manufacturing and testing of a TMG (thermoelectric microgenerator) with CNCs (carbon nanocapsules) film fabricated utilizing a CMOS (complementary metal oxide semiconductor) technology are investigated. The microgenerator includes a CNCs layer, thermopiles, and thermometers. CNCs, a heat absorbing material, are coated on the microgenerator, so that the TD (temperature difference) of HP (hot part) and CP (cold part) in the thermopiles increases, resulting in an enhancement of the microgenerator OP (output power). Thermometers fabricated in the microgenerator are employed to detect the HP and CP temperature in thermopiles. In order to enhance thermopiles’ TD, the HP in thermopiles was manufactured as suspension structures isolating heat dissipation, and the CP in thermopiles was made on a silicon substrate to increase the heat sink. Experiments showed that the microgenerator OV (output voltage) was 3.3 mV and its output power was 125 pW at TD 3 K. Voltage and power factors of TMG were 0.71 mV/K/mm2 and 9.04 pW/K2/mm2, respectively.
關聯:	Applied Sciences 8(7), 1047
DOI:	10.3390/app8071047
顯示於類別:	[機械與機電工程學系暨研究所] 期刊論文

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