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    題名: A Novel Method Guiding IC Manufacturing R&D Direction: Perspective from Knowledge Integration Innovation
    作者: Han-Jen Niu;Chao-Jung Chang
    關鍵詞: Integrated innovation method;R&D management;Virtual sensors;Knowledge management;Multivariate statistical analysis;IC manufacturing
    日期: 2018-08
    上傳時間: 2018-10-11 12:11:17 (UTC+8)
    摘要: Integrated circuit (IC) manufacturing involves complex processes and may
    require months to complete. Thousands of messages will be generated during each process,
    and most messages can easily be identified and analyzed. However, ambiguous information remains as a kind of tacit knowledge that is one of the most essential issues of R&D
    management. Integrated innovation is an application of scientific/technological creative
    solutions to complex processes. This research uses a case study of a semiconductor company in Hsinchu Science Park in northern Taiwan. Traditional methods only yield the
    results inferred from explicit knowledge, and omit the results based on tacit knowledge.
    The integrated method can be designated as a clear direction for the R&D which uses
    the multivariate statistical analysis as virtual sensors. By involving Hotelling T2, and
    the principal component analysis (PCA), to generate specific results corresponding to the
    core of the high density plasma chemical vapor deposition (HDP CVD) equipment or
    process, eliminate inaccurate information using the experience rating in a 12-inch fab.
    This provides an approach that can guide the R&D engineers and illuminate the entire
    process. In sum, both process stabilization and cost savings are the major advantages of
    virtual sensors.
    關聯: International Journal of Innovative Computing, Information and Control, 14(4), p.1371-1388
    DOI: 10.24507/ijicic.14.04.1371
    顯示於類別:[管理科學學系暨研究所] 期刊論文

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