本研究建立一套完整的偏振散射光量測系統，可對待測物進行二維和三維的散射光量測，此系統可分為三大部分:光源組件、旋轉控制機構與偵測組件，其中光源組件採用之雷射波長為405 nm, 515 nm, 671 nm搭配光圈、濾波鏡、λ /2 波板、偏振鏡、空間濾波器、擴束器進行偏振光源控制，旋轉控制機構運用四個旋轉步進馬達來控制入射光與接收端的角度，偵測組件為電荷偶合元件搭配35 mm物鏡與偏振鏡，藉由轉動偏振鏡來偵測不同偏振角度的散射光成像。為了驗證本系統的可行性，本研究選用三種待測物，分別為表面粗糙度標準片、木材和公制螺紋，其中表面粗糙度值為Ra = 1.6 μm、Ra = 0.8 μm、Ra = 0.4 μm、Ra = 0.1 μm，木材為南方松、杉木、白楊木，螺紋為公制M3和M6。經由實驗結果可知，三維偏振散射光可用來區分待測物的特徵和材質，對於未來自動光學檢測系統的發展有相當大的助益。 In this study, polarization scattering light measurement system is established. The characterization of surface measurement is investigated by using in-plane and out-of-plane polarized light-scattering measurements. This system is divided into the light source assembly, rotation control mechanism and detection component. The laser wavelengths of measurtment system are 405 nm, 515 nm and 671 nm. In order to adjust the polarized light sources, the light beam goes through the pinhole, waveplane, polarizer, space filter, and beam expander. The rotation control mechanism applies four stepper motors to control the incident angle and detection angle. The detection component is a charge couple device (CCD) camera. The polarizer and 35 mm focusing lens are set up in front of the CCD. The angle of polarizer is rotated to control the direction of polarization of the scattered light. This experiment conducts the measurements by using standard sheets of metal surface roughness, woods and ISO metric screws. The roughnesses are Ra = 1.6 μm , Ra = 0.8 μm , Ra = 0.4 μm and Ra = 0.1 μm , respectively. The woods are pine, spruce and aspen. The metric screws are ISO M6 and ISO M3. This measurement system can be used to quickly and accurately distinguish between different surfaces and properties. In the future, there is a considerable benefit at the development of automatic optical detection system.