淡江大學機構典藏:Item 987654321/114730
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    题名: 非聚焦共路徑雷射旋轉光學尺
    其它题名: Non-focused common-path laser rotary encoder
    作者: 林宜臻;Lin, I-Chen
    贡献者: 淡江大學機械與機電工程學系碩士班
    吳乾埼;Wu, Chyan-Chyi
    关键词: 旋轉光學尺;角位移量測;共路徑;光柵圓盤;rotary encoder;angular displacement;common-path;grating disk
    日期: 2017
    上传时间: 2018-08-03 15:02:08 (UTC+8)
    摘要: 習用雷射旋轉光學尺均為非共路徑架構，量測光與參考光行進的路徑不同，因此對於環境擾動敏感，量測誤差較大，量測解析度與準確度無法有效提高，限制習用雷射旋轉光學尺的發展。
    本文提出了一種非聚焦共路徑雷射旋轉光學尺( Non-focused Common-path Laser Rotary Encoder ，以下簡稱NFCPLRE)，具有元件少、組裝容易、高抗環境擾動能力、高量測解析度、與高準確度等優點。NFCPLRE的非聚焦光路使得其量測訊號穩定度高，同時，NFCPLRE對於光柵本身品質要求也較類似架構來得低，量測誤差大幅降低、光柵製造公差提高。
    本研究利用Renishaw Tonic進行NFCPLRE量測性能實驗評估，並進行誤差分析。實驗結果顯示，角位移360度中Renishaw Tonic與NFCPLRE的平均差量為0.00149 度。而NFCPLRE於三小時系統穩定度量測中產生漂移量為0.00067 ± 0.0002 度，解析度約0.00014 ± 0.00007 度。綜合本研究的實驗評估與分析，可知NFCPLRE在超精密機械應用相當有潛力。
    Commonly used laser encoders are of non-common-path configuration. The non-common-path configuration between the measurement and reference beams is susceptible to environmental disturbances, and thus produces additional error. Under normal circumstances, the precision measurement, positioning process, and displacement measurement resolution and accuracy is greatly affected. Environmental disturbance factors make laser optical device technology.
    This study proposes a Non-focused Common-path Laser Rotary Encoder device called (NFCPLRE). NFCPRLE can effectively overcome the problems in the past without focused laser design. NFCPLRE compared with CPLRE for the grating quality requirements is also much low.
    In this study, NFCPLRE conduct experimental evaluation of performance test and error analysis with Renishaw Tonic interferometer for offset evaluation, it is displayed in the analysis and the experimental results. In the angular displacement of 360 degree, the average differential of NFCPLRE was 0.00149 degree with Renishaw Tonic interferometer. The time dependent drift of NFCPLRE was measured for a period of three hour and was found to be 0.00067 ± 0.0002 deg with 0.00014 ± 0.00007 deg resolution. It is therefore shown that NFCPLRE has enormous potential forfuture development.
    显示于类别:[機械與機電工程學系暨研究所] 學位論文

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