淡江大學機構典藏:Item 987654321/112614
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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/112614


    Title: 發光二極體之製造方法
    Authors: 許世杰、張俊彥、凃博閔、侯翔彬、賴永裕
    Date: 2014-01-09
    Issue Date: 2018-01-30 02:10:22 (UTC+8)
    Abstract: 本發明係有關於一種發光二極體之製造方法，其包含下列步驟：取一基板，於該基板上生長一無摻雜氮化鎵磊晶層，以蝕刻法蝕刻該無摻雜氮化鎵磊晶層而形成一多孔性結構層，於該多孔性結構層上再形成氮化鎵磊晶層、金屬層以及矽基板，最後以機械方式將磊晶層自該基板上剝離並置換至另一基板上，其中該多孔性結構層之微米或奈米柱結構配合機械式剝離可以達到一次性且快速的剝離效果，並不需另外再使用其他剝離方式。
    Appears in Collections:[Graduate Institute & Department of Chemical and Materials Engineering] Patent

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