淡江大學機構典藏:Item 987654321/111949
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    题名: Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries
    作者: Chien-Kai Wang;Wei-Hao Liao;Hsiao-Mei Wu;Yuan-Hsiu Lo;Ting-Ru Lin;Yi-Chung Tung
    关键词: polydimethylsiloxane;wet etching;microfluidics
    日期: 2017-09-28
    上传时间: 2017-11-01 02:11:32 (UTC+8)
    出版者: IOP Publishing Ltd
    摘要: Polydimethylsiloxane (PDMS) has become a widely used material to construct microfluidic devices for various biomedical and chemical applications due to its desired material properties and manufacturability. PDMS microfluidic devices are usually fabricated using soft lithography replica molding methods with master molds made of photolithogrpahy patterned photoresist layers on silicon wafers. The fabricated microfluidic channels often have rectangular cross-sectional geometries with single or multiple heights. In this paper, we develop a single step sequential PDMS wet etching process that can be used to fabricate microfluidic channels with various cross-sectional geometries from a single-layer PDMS microfluidic channels. The cross-sections of the fabricated channel can be non-rectangular, and varied along the flow direction. Furthermore, the fabricated cross-sectional geometries can be numerically simulated beforehand. In the experiments, we fabricate microfluidic channels with various cross-sectional geometries using the developed technique. In addition, we fabricate a microfluidic mixer with alternative mirrored cross-sectional geometries along the flow direction to demonstrate practical usage of the developed technique.
    關聯: Journal of Micromechanics and Microengineering 27(11), 115003 (9 pages)
    DOI: 10.1088/1361-6439/aa874d
    显示于类别:[土木工程學系暨研究所] 期刊論文

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