本論文主要研究微米方柱結構在不同波長的雷射照射下，產生的光子奈米噴流現象，根據光波的傳播方向可以分成穿透式與反射式，微米方柱的材料為聚二甲基矽氧烷和二氧化矽，方柱結構則使用半導體製程和翻模技術製作出來。本論文的研究方法為理論模擬與實驗量測，針對不同尺寸大小的微米方柱和有無金屬薄殼，觀察所形成的光子奈米噴流之變化。在理論方面，本論文使用時域有限差分法模擬不同金屬殼的微米方柱在不同尺寸大小和不同的入射波長照射下，光場分佈和光強度的變化。在實驗量測方面，本論文使用高靈敏度光學顯微鏡系統觀察薄殼微米方柱的光子奈米噴流現象，並撰寫電腦程式計算出光子奈米噴流的各項參數，如噴流焦距、半高全寬、衰減長度等，最後將模擬計算和實驗結果互相比較。本論文發現鍍有金屬殼的微米方柱比起無殼微米方柱的噴流現象效果更佳，聚焦清晰可見、光強度更集中，此研究結果可幫助未來奈米等級光學顯微鏡的發展。 In this study, the photonic nanojets are created by micro-cuboid structures at different wavelengths of laser. The propagation directions of lightwave include penetrating and reflection modes. The materials of micro-cuboids are polydimethylsiloxane(PDMS) and SiO2. The cuboid structures are fabricated by semiconductor and replica molding processes. The research procedure of this study include theoretical calculation and experimental measurements. The variations of photonic nanojets are observed in different dimension of micro-cuboids and metallic shells. In theoretical method, the finite-difference time-domain method is used to simulate the intensity distribution of photonic nanojets in the different core-shell cuboids at different wavelengths. In experimental measurements, the high sensitivity optical microscope system are used to observe the actual image of photonic nanojets in different micro-cuboids. The parameters of photonic nanojets are calculated by computer program including focal length, Full Width at Half Maximum(FWHM), and decay length. The experimental data are compared with simulation results. The effect of photonic nanojets are created by core-shell micro-cuboids is better than dielectric micro-cuboids. The spot and intensity are more clear and concentration. The study results can help to develop the nano-scale optical microscope in the future.
